7/6/2011	12:48:08 PM	Program started after a nonstandard shutdown
7/6/2011	12:48:08 PM	Helium valve closed
7/6/2011	12:48:08 PM	H2 valve closed
7/6/2011	12:48:08 PM	BCl3 valve closed
7/6/2011	12:48:08 PM	PH3 valve closed
7/6/2011	12:48:08 PM	SiCl4 pre valve closed
7/6/2011	12:48:08 PM	SiCl4 post valve closed
7/6/2011	12:48:08 PM	Main Vac valve closed
7/6/2011	12:48:08 PM	Bypass valve closed
7/6/2011	12:48:08 PM	Bubbler valve closed
7/6/2011	12:48:08 PM	Helium MFC set to  0.000000
7/6/2011	12:48:08 PM	H2 MFC set to  0.000000
7/6/2011	12:48:08 PM	BCl3 MFC set to  0.000000
7/6/2011	12:48:08 PM	PHl3 MFC set to  0.000000
7/6/2011	12:48:08 PM	SiCl4 MFC set to  0.000000
7/6/2011	12:48:08 PM	Bypass solenoid MFC set to  760.000000
7/6/2011	12:48:08 PM	Error in setting the tube furnace  to 0
7/6/2011	12:54:36 PM	H2 valve opened
7/6/2011	12:54:58 PM	H2 valve closed
7/6/2011	12:56:17 PM	Helium valve opened
7/6/2011	12:56:36 PM	Helium valve closed
7/6/2011	1:00:48 PM	BCl3 valve opened
7/6/2011	1:01:02 PM	BCl3 valve closed
7/6/2011	1:02:07 PM	SiCl4 pre valve opened
7/6/2011	1:02:50 PM	SiCl4 pre valve closed
7/6/2011	1:03:53 PM	SiCl4 post valve opened
7/6/2011	1:04:05 PM	SiCl4 post valve closed
7/6/2011	1:06:01 PM	PH3 valve opened
7/6/2011	1:06:55 PM	PH3 valve closed
7/6/2011	1:12:29 PM	Main Vac valve opened
7/6/2011	1:12:40 PM	Main Vac valve closed
7/6/2011	1:13:43 PM	Bypass valve opened
7/6/2011	1:13:56 PM	Bypass valve closed
7/6/2011	1:30:49 PM	Program started after a nonstandard shutdown
7/6/2011	1:30:49 PM	Helium valve closed
7/6/2011	1:30:49 PM	H2 valve closed
7/6/2011	1:30:49 PM	BCl3 valve closed
7/6/2011	1:30:49 PM	PH3 valve closed
7/6/2011	1:30:49 PM	SiCl4 pre valve closed
7/6/2011	1:30:49 PM	SiCl4 post valve closed
7/6/2011	1:30:49 PM	Main Vac valve closed
7/6/2011	1:30:49 PM	Bypass valve closed
7/6/2011	1:30:49 PM	Bubbler valve closed
7/6/2011	1:30:49 PM	Helium MFC set to  0.000000
7/6/2011	1:30:50 PM	H2 MFC set to  0.000000
7/6/2011	1:30:50 PM	BCl3 MFC set to  0.000000
7/6/2011	1:30:50 PM	PHl3 MFC set to  0.000000
7/6/2011	1:30:50 PM	SiCl4 MFC set to  0.000000
7/6/2011	1:30:50 PM	Bypass solenoid MFC set to  760.000000
7/6/2011	1:30:50 PM	Tube furnace set to 0
7/6/2011	1:30:53 PM	Bubbler valve opened
7/6/2011	1:31:13 PM	Bubbler valve closed
7/6/2011	1:31:25 PM	Program started after a nonstandard shutdown
7/6/2011	1:31:25 PM	Helium valve closed
7/6/2011	1:31:25 PM	H2 valve closed
7/6/2011	1:31:25 PM	BCl3 valve closed
7/6/2011	1:31:25 PM	PH3 valve closed
7/6/2011	1:31:25 PM	SiCl4 pre valve closed
7/6/2011	1:31:25 PM	SiCl4 post valve closed
7/6/2011	1:31:25 PM	Main Vac valve closed
7/6/2011	1:31:25 PM	Bypass valve closed
7/6/2011	1:31:25 PM	Bubbler valve closed
7/6/2011	1:31:25 PM	Helium MFC set to  0.000000
7/6/2011	1:31:25 PM	H2 MFC set to  0.000000
7/6/2011	1:31:25 PM	BCl3 MFC set to  0.000000
7/6/2011	1:31:25 PM	PHl3 MFC set to  0.000000
7/6/2011	1:31:25 PM	SiCl4 MFC set to  0.000000
7/6/2011	1:31:25 PM	Bypass solenoid MFC set to  760.000000
7/6/2011	1:31:25 PM	Tube furnace set to 0
7/6/2011	1:41:47 PM	Bypass valve opened
7/6/2011	1:44:15 PM	Bypass valve closed
7/6/2011	1:44:19 PM	Main Vac valve opened
7/6/2011	2:57:00 PM	Main Vac valve closed
7/6/2011	5:35:58 PM	Bypass valve opened
7/6/2011	5:37:18 PM	Bypass valve closed
7/6/2011	5:37:19 PM	Main Vac valve opened
7/6/2011	6:15:38 PM	Main Vac valve closed
7/6/2011	6:25:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2011	6:25:45 PM	Recipe started at 6:25 PM
7/6/2011	6:25:45 PM	Helium valve closed
7/6/2011	6:25:45 PM	H2 valve closed
7/6/2011	6:25:45 PM	BCl3 valve closed
7/6/2011	6:25:45 PM	PH3 valve closed
7/6/2011	6:25:45 PM	SiCl4 pre valve closed
7/6/2011	6:25:45 PM	SiCl4 post valve closed
7/6/2011	6:25:45 PM	Main Vac valve closed
7/6/2011	6:25:45 PM	Bubbler valve closed
7/6/2011	6:25:45 PM	Bypass valve opened
7/6/2011	6:25:45 PM	Helium MFC set to  0.000000
7/6/2011	6:25:45 PM	H2 MFC set to  0.000000
7/6/2011	6:25:45 PM	BCl3 MFC set to  0.000000
7/6/2011	6:25:45 PM	PHl3 MFC set to  0.000000
7/6/2011	6:25:45 PM	SiCl4 MFC set to  0.000000
7/6/2011	6:25:45 PM	Bypass solenoid MFC set to  0.000000
7/6/2011	6:25:45 PM	Tube furnace set to 0
7/6/2011	6:27:59 PM	Helium valve closed
7/6/2011	6:27:59 PM	H2 valve closed
7/6/2011	6:27:59 PM	BCl3 valve closed
7/6/2011	6:27:59 PM	PH3 valve closed
7/6/2011	6:27:59 PM	SiCl4 pre valve closed
7/6/2011	6:27:59 PM	SiCl4 post valve closed
7/6/2011	6:27:59 PM	Main Vac valve closed
7/6/2011	6:27:59 PM	Bubbler valve closed
7/6/2011	6:27:59 PM	Bypass valve opened
7/6/2011	6:27:59 PM	Helium MFC set to  0.000000
7/6/2011	6:27:59 PM	H2 MFC set to  0.000000
7/6/2011	6:27:59 PM	BCl3 MFC set to  0.000000
7/6/2011	6:27:59 PM	PHl3 MFC set to  0.000000
7/6/2011	6:27:59 PM	SiCl4 MFC set to  0.000000
7/6/2011	6:27:59 PM	Bypass solenoid MFC set to  0.000000
7/6/2011	6:27:59 PM	Tube furnace set to 0
7/6/2011	6:28:59 PM	Helium valve closed
7/6/2011	6:28:59 PM	H2 valve closed
7/6/2011	6:28:59 PM	BCl3 valve closed
7/6/2011	6:28:59 PM	PH3 valve closed
7/6/2011	6:28:59 PM	SiCl4 pre valve closed
7/6/2011	6:28:59 PM	SiCl4 post valve closed
7/6/2011	6:28:59 PM	Bypass valve closed
7/6/2011	6:28:59 PM	Bubbler valve closed
7/6/2011	6:28:59 PM	Main Vac valve opened
7/6/2011	6:28:59 PM	Helium MFC set to  0.000000
7/6/2011	6:28:59 PM	H2 MFC set to  0.000000
7/6/2011	6:28:59 PM	BCl3 MFC set to  0.000000
7/6/2011	6:28:59 PM	PHl3 MFC set to  0.000000
7/6/2011	6:28:59 PM	SiCl4 MFC set to  0.000000
7/6/2011	6:28:59 PM	Bypass solenoid MFC set to  0.000000
7/6/2011	6:29:00 PM	Tube furnace set to 0
7/6/2011	6:29:01 PM	Run finished at 6:29 PM
7/6/2011	6:29:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
